Surface smoothing effect of an amorphous thin film deposited by atomic layer deposition on a surface with nano-sized roughness: AIP Advances: Vol 4, No 2
The effect of surface preparation on the protective properties of Al2O3 and HfO2 thin films deposited on cp-titanium by atomic layer deposition - ScienceDirect
Lithium metal protected by atomic layer deposition metal oxide for high performance anodes - Journal of Materials Chemistry A (RSC Publishing)
Eindhoven University of Technology MASTER Surface smoothing using atomic layer deposition and etching Gerritsen, S.H.
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of Materials
Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and zirconium oxide thin films
Atomic layer–deposited nanostructures and their applications in energy storage and sensing | Journal of Materials Research | Cambridge Core
C | Free Full-Text | Atomic Layer Deposition of Nanolayered Carbon Films | HTML
Atomic Layer Deposition in Nanopores | InRedox
AFM topography of silver surfaces deposited on smooth or rough ZnO... | Download Scientific Diagram
Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen | Chemistry of Materials
The effect of surface preparation on the protective properties of Al2O3 and HfO2 thin films deposited on cp-titanium by atomic layer deposition - ScienceDirect
Atmospheric pressure atomic layer deposition of iron oxide nanolayer on the Al2O3/SiO2/Si substrate for mm-tall vertically aligned CNTs growth | SpringerLink
Cobalt Metal ALD: Understanding the Mechanism and Role of Zinc Alkyl Precursors as Reductants for Low-Resistivity Co Thin Films | Chemistry of Materials
Review Article: Atomic layer deposition of optoelectronic materials: Journal of Vacuum Science & Technology B: Vol 37, No 3
How Atomic Layer Deposition Works
Atomic layer deposition for nonconventional nanomaterials and their applications | Journal of Materials Research | Cambridge Core
A brief review of atomic layer deposition: from fundamentals to applications - ScienceDirect
Advances in Atomic Layer Deposition | SpringerLink
Catalysts | Free Full-Text | Atomic Layer Deposition for Preparation of Highly Efficient Catalysts for Dry Reforming of Methane | HTML
Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond - Mattinen - 2021 - Advanced Materials Interfaces - Wiley Online Library
Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma | Chemistry of Materials
