Combinatorial Optimization of a Molecular Glass Photoresist System for Electron Beam Lithography - Bauer - 2011 - Advanced Materials - Wiley Online Library
Electron beam lithography and its use on 2D materials - Book chapter - IOPscience
Nanopatterning | Multi-Field Patterning Sequences | Supplier
High-Resolution Lithography | Nanolithography | Supplier
Single-digit nanometer nanoimprint templates
Nanowire Formation Using Electron Beam Lithography
New ELPHY functionalities - Raith - Nanofabrication systems for EBL and FIB
Open Research Online oro.open.ac.uk
Helium and Neon Ion Beam Lithography with ORION NanoFab
Software Manual for Elphy Plus System Version 3.00
Hardware Operation Manual ELPHYQuantum and ELPHY Plus
Direct e-beam lithography of PDMS - ScienceDirect
Electron beam lithography
PI-2005 CompactPCI Pattern Generator
Nanopatterning | Multi-Field Patterning Sequences | Supplier
Electron beam lithography of molecular glass resist films prepared by physical vapor deposition
NNCI ELECTRON BEAM LITHOGRAPHY
Dual beam lithography (FIB + EBL) for nanometric structures | IEEE Conference Publication | IEEE Xplore
Nanowire Formation Using Electron Beam Lithography
Software Reference Manual Version 5.0
PDF) Reflective Electron Beam Lithography: Lithography Results Using CMOS Controlled Digital Pattern Generator Chip
Nanopatterning | Multi-Field Patterning Sequences | Supplier
Nanopatterning | Multi-Field Patterning Sequences | Supplier
Performance of a high resolution chemically amplified electron beam resist at various beam energies - ScienceDirect
New ELPHY functionalities - Raith - Nanofabrication systems for EBL and FIB
