Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma
High-temperature etching of SiC in SF6/O2 inductively coupled plasma | Scientific Reports
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High-temperature etching of SiC in SF6/O2 inductively coupled plasma
High-temperature etching of SiC in SF6/O2 inductively coupled plasma
A study on plasma parameters in Ar/SF6 inductively coupled plasma: Physics of Plasmas: Vol 24, No 1
PDF) Plasma Etching Behavior of SF6 Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
PDF) Plasma Etching Behavior of SF6 Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
Coatings | Free Full-Text | Plasma Etching Behavior of SF6 Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
Coatings | Free Full-Text | Plasma Etching Behavior of SF6 Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
The Etching Reaction and Surface Reconstruction of Bismuth Zinc Niobate Thin Film in SF6/Ar Plasma | Scientific.Net
Highly Anisotropic Fluorineв•'Based Plasma Etching of Ultralow Expansion Glass
Mass loss owing to NF3 plasma etching: Y2O3 and YO0.6F2.1 coatings. | Download Scientific Diagram
Coatings | Free Full-Text | Plasma Etching Behavior of SF6 Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
PDF) Plasma Etching Behavior of SF6 Plasma Pre-Treatment Sputter-Deposited Yttrium Oxide Films
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Coatings | Free Full-Text | Sulfur Hexafluoride (SF6) Plasma Treatment of Medical Grade Poly(methyl methacrylate) | HTML
Coatings | Free Full-Text | Sulfur Hexafluoride (SF6) Plasma Treatment of Medical Grade Poly(methyl methacrylate) | HTML
USG etch rate versus trench width for SF6 plasma etching with AlN mask... | Download Scientific Diagram
A study on plasma parameters in Ar/SF6 inductively coupled plasma: Physics of Plasmas: Vol 24, No 1
Microstructure and plasma corrosion behavior of yttria coatings prepared by the aerosol deposition method - Ashizawa - 2020 - Journal of the American Ceramic Society - Wiley Online Library
Coatings | Free Full-Text | Sulfur Hexafluoride (SF6) Plasma Treatment of Medical Grade Poly(methyl methacrylate) | HTML
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UV/VIS transmittance spectra of untreated (dash line) and... | Download Scientific Diagram
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