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Heterogeneous bonding between cyclo‐olefin polymer (COP) and glass‐like substrate by newly developed water vapor‐assisted plasma, Aqua Plasma Cleaner - Terai - 2018 - Electrical Engineering in Japan - Wiley Online Library
Cleaning of co-deposited layers by movable devices based on radiofrequency discharges C. Stancu 1, E.R. Rosini 1, V. Satulu 1, T. Acsente 1, B. Mitu 1, - ppt download
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